SMC High Vacuum Angle Valve
Product Code: XLA-63G-2M9//...
Available to Order
tech sheet
Details
Body Material
Aluminium
Operation
Normally Closed Bellows Seal
Application
High vacuum angle valve for semiconductor and vacuum applications
Brand
SMC
Seal Material
FKM
Series
XL2
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Feature
Length mm
Height mm
Seal Type
Actuation
Valve Material
Angle
Application
Flange Specification
Operation
Ambient Temperature
List Price
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121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
48
Bellows Seal
Normally Closed
Aluminium
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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Bellows Seal
Single acting
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Angle valve
High vacuum applications requiring minimal contamination and corrosion resistance
KF NW
Normally Closed
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Available to Order
185
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110
79
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Normally Closed
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Bellows Seal
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High Vacuum
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Normally Closed
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Available to Order
171
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98
66
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order
108
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59
38
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Normally Closed
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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High Vacuum
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Normally Closed Bellows Seal
5 to 60°C
Available to Order
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Available to Order