Details
Body Material
Aluminium
Seal Type
Bellows Seal
Application
High vacuum angle valve for semiconductor and vacuum applications
Brand
SMC
Seal Material
FKM
Width mm
121
Valve Material
Aluminium
Series
XL2
Height mm
48
Manufacturer
SMC
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Length mm
74
Actuation
Normally Closed
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Angle
Feature
Application
Actuation
Flange Specification
Operation
Width mm
Height mm
Length mm
Ambient Temperature
List Price
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Available to Order
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Angle valve
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High vacuum applications requiring minimal contamination and corrosion resistance
Single acting
KF NW
Normally Closed
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Available to Order
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185
79
110
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
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Normally Closed
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Available to Order
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171
66
98
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Available to Order
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order
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Normally Closed
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108
38
59
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Available to Order
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Normally Closed
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
High Vacuum
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Normally Closed Bellows Seal
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5 to 60°C
Available to Order
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