Details
Body Material
Aluminium
Seal Type
Bellows Seal
Application
High vacuum angle valve for semiconductor and vacuum applications
Brand
SMC
Seal Material
FKM
Width mm
121
Valve Material
Aluminium
Series
XL2
Height mm
48
Manufacturer
SMC
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Length mm
74
Actuation
Normally Closed
Specification
SMC High Vacuum Angle Valve, SMC
