SMC High Vacuum Angle Valve
Product Code: XLA-50-2-XF1A...
Available to Order
tech sheet
Details
Application
High Vacuum
Body Material
Aluminium
Operation
Normally Closed Bellows Seal
Brand
SMC
Seal Material
FKM
Ambient Temperature
5 to 60°C
Series
XL2
Manufacturer
SMC
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Length mm
Height mm
Application
Seal Type
Actuation
Valve Material
Angle
Feature
Flange Specification
Operation
List Price
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Available to Order
121
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48
High vacuum angle valve for semiconductor and vacuum applications
Bellows Seal
Normally Closed
Aluminium
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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Available to Order
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High vacuum applications requiring minimal contamination and corrosion resistance
Bellows Seal
Single acting
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Angle valve
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
KF NW
Normally Closed
Available to Order
185
110
79
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
Bellows Seal
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Normally Closed
Available to Order
171
98
66
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
Available to Order
108
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38
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Normally Closed
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Available to Order
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Normally Closed
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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–
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Normally Closed Bellows Seal
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Normally Closed Bellows Seal
Available to Order
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Available to Order
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Available to Order
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Available to Order