Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Feature
Length mm
Height mm
Series
Application
Seal Type
Actuation
Body Material
Seal Material
Valve Material
Angle
Flange Specification
Operation
Ambient Temperature
List Price
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Available to Order
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
48
XL2
High vacuum angle valve for semiconductor and vacuum applications
Bellows Seal
Normally Closed
Aluminium
FKM
Aluminium
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
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–
–
–
Available to Order
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
XL2
High vacuum applications requiring minimal contamination and corrosion resistance
Bellows Seal
Single acting
Aluminium
FKM
–
Angle valve
KF NW
Normally Closed
–
Available to Order
185
–
110
79
XL2
–
–
–
Aluminium
FKM
–
–
–
–
–
Available to Order
–
–
–
–
XL2
–
–
Normally Closed
Aluminium
FKM
–
–
–
–
–
Available to Order
–
–
–
–
XL2
High Vacuum
Bellows Seal
–
Aluminium
FKM
–
–
–
Normally Closed
–
Available to Order
171
–
98
66
XL2
–
–
–
Aluminium
FKM
–
–
–
–
–
Available to Order
–
–
–
–
XL2
High Vacuum Angle Valve
–
–
Aluminium
FKM
–
–
–
Normally Closed Bellows Seal
–
Available to Order
108
–
59
38
XL2
–
–
Normally Closed
Aluminium
FKM
–
–
–
–
–
Available to Order
–
–
–
–
XL2
–
–
Normally Closed
Aluminium
FKM
–
–
–
–
–
Available to Order
–
–
–
–
XL2
High vacuum angle valve for semiconductor and vacuum applications
–
–
Aluminium
FKM
–
–
–
Normally Closed Bellows Seal
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
XL2
–
–
–
Aluminium
FKM
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
XL2
–
–
–
Aluminium
FKM
–
–
–
Normally Closed Bellows Seal
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
XL2
High Vacuum
–
–
Aluminium
FKM
–
–
–
Normally Closed Bellows Seal
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
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–
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–
–
Available to Order


