SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A...
Available to Order
tech sheet
Details
Angle
Angle valve
Body Material
Aluminium
Seal Type
Bellows Seal
Operation
Normally Closed
Brand
SMC
Seal Material
FKM
Actuation
Single acting
Series
XL2
Manufacturer
SMC
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Flange Specification
KF NW
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Feature
Length mm
Height mm
Application
Actuation
Valve Material
Operation
Ambient Temperature
List Price
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Available to Order
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
48
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Aluminium
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Available to Order
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Available to Order
185
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110
79
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
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Normally Closed
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Available to Order
171
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98
66
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Available to Order
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order
108
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59
38
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Normally Closed
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Available to Order
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Normally Closed
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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High Vacuum
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Normally Closed Bellows Seal
5 to 60°C
Available to Order
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Available to Order
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Available to Order