SMC High Vacuum Angle Valve
Product Code: XLA-40-2M9//...
Available to Order
tech sheet
Details
Body Material
Aluminium
Feature
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Seal Type
Bellows Seal
Operation
Normally Closed
Brand
SMC
Seal Material
FKM
Actuation
Single acting
Series
XL2
Width mm
171
Length mm
98
Manufacturer
SMC
Height mm
66
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Feature
Length mm
Height mm
Application
Actuation
Valve Material
Angle
Flange Specification
Operation
Ambient Temperature
List Price
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Available to Order
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
48
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Aluminium
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Available to Order
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Available to Order
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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High vacuum applications requiring minimal contamination and corrosion resistance
Single acting
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Angle valve
KF NW
Normally Closed
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Available to Order
185
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110
79
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Available to Order
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Normally Closed
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Available to Order
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High Vacuum
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Normally Closed
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Available to Order
171
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98
66
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Available to Order
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order
108
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59
38
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Normally Closed
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Available to Order
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Normally Closed
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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High Vacuum
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Normally Closed Bellows Seal
5 to 60°C
Available to Order
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Available to Order