SMC Slit Valve

Series

XGT

Valve Material

FKM (Gate O-ring Material)

Application

Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment

Brand

SMC

Accessories

Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism

Manufacturer

SMC

Model

XGT223-46236-1F