SMC Slit Valve
Product Code: XGT222-46236-1F...
Available to Order
tech sheet
Details
Actuation
Cassette Type Standard
Series
XGT
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Brand
SMC
Manufacturer
SMC
Material
Gate O-ring FKM
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Accessories
Model
Valve Material
List Price
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
XGT223-46236-1F
FKM (Gate O-ring Material)
Available to Order